If you can control the rate, you might be able to do ion milling.

Henry

David Kelly @memsnet.org on 04/10/2002 10:22:27 AM

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Subject:    [mems-talk] etch al2o3



Does someone know how to etch a sputtered layer of Al2O3 without attacking
the
aluminum metal layer underneath?  Note that I am not interested in simply
removing a native oxide layer.  If anyone could give some insight, it would
be
greatly appreciated.

THANKS!
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