durusmail: mems-talk: Wet Etching
Wet Etching
Wet Etching
aslam muhammad
2002-04-11
Hi Friends

              I want to use TMAH and KOH as etchant to
etch bulk silicon ( 500 micron).  which one is more
suitable.  my etch mask is SiO2.  what is the recipe
of a good etching rate KOH and TMAH please.

Thankx


M. Aslam
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