Hello Jennifer:

Innovative Micro Technology has the STS DRIE with the anti-footing option
and has extensive etching experience.  This and our other
capabilities/experience are described on our web site at www.imtmems.com
 .  Please call me directly if you would like to
inquire about our services.

Regards- Monte.

Monteith G. Heaton 
VP Marketing and Sales
Innovative Micro Technology
75 Robin Hill Road * Santa Barbara, CA  93117
Ph:  805-681-2852 * Fx:  805-967-2677
info@imtmems.com   * www.imtmems.com

_________________________________________
"Your strategic partner for MEMS design and 6" wafer
manufacturing services with 0.355m photolithography,
30,000 sq. ft. fab, and non-CMOS materials flexibility,
including metals/magnetics."



-----Original Message-----
From:   Jennifer Scalf [mailto:jenscalf@hotmail.com]

Sent:   Friday, April 12, 2002 1:11 PM
To:     mems-talk@memsnet.org 
Subject:        [mems-talk] Commercial DRIE services w/ SOI anti-footing
option.

I am looking for commercial vendors of DRIE services-specifically, I am
looking for vendors whose DRIE machines are outfitted with the SOI
anti-footing capability (i.e. pulsed platen power).
I know for sure ISSYS and SNF do not have the anti-footing option.
Any leads would be appreciated.
Thank you very much,
J. Scalf


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