Xinyu, I had cracks and delamination in my SU-8 before I started to make any PDMS replicas. This was remedied in my case by decreasing the exposure time. You may want to try adjusting your fabrication parameters. Glen At 10:58 AM 4/12/2002, you wrote: Dear Colleagues, I am making and using mold out of SU-8 photoresist. The problem is that it cracks after several PDMS replicas. Would you please share what could cause this and how to avoid this. Thanks. Xinyu Li ********************************************* Glen A. Landry, Ph.D. Naval Research Laboratory Materials Physics Branch Code 6340 4555 Overlook Ave. SW Washington, DC 20375 USA Tel.: 202-767-4474 Fax: 202-767-1697 *********************************************