It sounds like the simple addition of ultrasonic energy to your wet bath will
help you to remove the PMMA.  You can probably get further help from Microchem
on the best way to get ultrasonic energy into the equation.  Bill Moffat

-----Original Message-----
From: Peng Jin [mailto:P.Jin@bham.ac.uk]
Sent: Tuesday, April 16, 2002 7:01 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] About the remove of PMMA sacrificial layer


Dear fellow MEMS Researchers,

In my experiment, I use PMMA (Microchem) as sacrificial layer. The process is
following,

First spincoat PMMA at 800rpm for 30 sec, and prebake at 180 centi degree for
1 hours.

And then deposit the other kind of material at 95 centi degree for over 30
hours.

When experiment finished, I use acetone to remove the PMMA. But I find it is
very difficult to remove PMMA layer completely. I have tried water bath at 70
centi degree, but there are no obviously change.

Has anybody done this before? Any suggestion are highly appreciated.

Cheers

Peng
>=========================================
>Dr. P. Jin
>Research Associate
>School of Manufacturing and Mechanical Engineering
>The University of Birmingham
>Edgbaston, Birmingham B15 2TT
>Tel:  ++44-121-414-4256
>=========================================
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