Hi Mathieu,

SU8 will survive the KOH, but it will come off from your silicon during the
process. I don't think it is an option.

Best regards,
Gabriela Juarez-Martinez
Dept. Electronics
University of Glasgow
Glasgow G12 8LT

> Dear MEMS society,
>
> I want to protect some alignment marks with SU-8 to etch poly-Si in a
> KOH
> bath. What happens with SU-8, is it etched? What's the etch rate?....
>
> How can I protect these alignment marks in poly-Si in the KOH bath?
>
> Thank you for your answer
>
> Regards
>
> Mathieu
>
> -----------------------------------------------------------------------------
> --
> Mathieu Burri
> Sensors, Actuators and Microsystems Laboratory
> Institute of Microtechnology
> University of Neuchbtel
> Rue Jacquet Droz 1
> CH-2007 Neuchbtel
> Switzerland
> Tel: +41 32 720 52 78
> Fax: +41 32 720 57 11
> E-mail: mathieu.burri@unine.ch
> Internet: http://www-samlab.unine.ch
> _____________________________________________________________________________