We use HMDS, and it works pretty well. We've found that borosilicate float
glass works better than pyrex in terms of spin-coating. What kind of glass
are you using?

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Battery is safe if not provoked." -- _Batteries in a Portable World_

On Fri, 19 Apr 2002, Rishi Mulgund wrote:

> Hello All,
>       I am trying to Spin Coat Teflon AF 2400 onto a glass substrate but I am
> having problems getting the Teflon to uniformly coat because of adhesion
> problems.  I have heard a great deal of talk about using fluorosilane as an
> adhesion agent, but I can't seem to find it anywhere.  Does anyone know
> where I might be able to find this fluorosilane or have any possible
> solutions to my adhesion problem?
>
> Rishi Mulgund
>
> __________________________________________________
> Rishi D. Mulgund
> rm005h@mail.rochester.edu
> (716) 274-4293
> CPU Box 273662
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