Dear All

I've had some SOI wafers coated with Si3N4 and patterned on one face.
Unfortunately, the wrong face has been patterned. I don't want to
dispose of the wafers because of their cost. I've been told that I can
have the nitride striped off both faces (with RIE), then re-applied and
patterned on the correct face. What I need to know, does the stripping
damage the silicon in anyway?


Regards



Richard Haigh