References for corner compensation:

X.P. Wu and W.-H. Ko, "A study on Compensating Corner Undercutting in
Anisotropic Etching of (100) Silicon," Transducers '87, pp. 126-9.

H. Sandmaier, H.L. Offereins, K Ku:hl, and W. Lang, "Corner Compensation
Techniques in Anisotropic Etching of (100) Silicon Using Aqueous
KOH," Transducers '91, pp. 456-9.

P. Enoksson, G. Stemme, and E. Stemme, "Vibration Modes of a Silicon Tube
Density Sensor," JMEMS V.5, #1, pp. 39-44.

P. Enoksson, "New Structure for Corner Compensation in Anisotropic KOH
Etching," JMEMS V.7, #3, pp. 141-4.

The source I got these from is pretty old, so it doesn't give anything
newer than about 1998.

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Battery is safe if not provoked." -- _Batteries in a Portable World_

On Mon, 22 Apr 2002, [iso-8859-1] Michele Finardi wrote:

> Hallo,
> I'm about to start working on convex corner
> compensation. Could you please indicate me some
> references or share your personal knowledge?
> Thank you very much.
>
> Michele Finardi
>
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