Hallo Rishi Mulgund,
...you can try 1H, 1H, 2H, 2H-perfluorodecyltriethoxy silane. Make a  2%
solution of the fluorosilane in PGMEA (or 2-Butanon or ethanol) and spin on
it. Then bake the wafer 1000C for 10 mminutes. The silane is available at:
Lancaster Synthesis - www.lancastersynthesis.com
LS #16585 (catalog number)

good luck
Jens Tuchscheerer

----- Original Message -----
From: "Rishi Mulgund" 
To: 
Sent: Friday, April 19, 2002 10:02 PM
Subject: [mems-talk] Teflon AF Adhesion Problem


> Hello All,
> I am trying to Spin Coat Teflon AF 2400 onto a glass substrate but I am
> having problems getting the Teflon to uniformly coat because of adhesion
> problems.  I have heard a great deal of talk about using fluorosilane as
an
> adhesion agent, but I can't seem to find it anywhere.  Does anyone know
> where I might be able to find this fluorosilane or have any possible
> solutions to my adhesion problem?
>
> Rishi Mulgund
>
> __________________________________________________
> Rishi D. Mulgund
> rm005h@mail.rochester.edu
> (716) 274-4293
> CPU Box 273662
> _______________________________________________
> mems-talk@memsnet.org mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.mems-exchange.org/