Dear Richard,
If you want to remove all the nitride layer, you can do it with a wet
etching (ortophosphoric acid). It does not damage the silicon surface.
Sandra Bermejo,
Semiconductor Device Group,
UPC
Barcelon, Spain

"Haigh, Richard" ha escrito:

> Dear All
>
> I've had some SOI wafers coated with Si3N4 and patterned on one face.
> Unfortunately, the wrong face has been patterned. I don't want to
> dispose of the wafers because of their cost. I've been told that I can
> have the nitride striped off both faces (with RIE), then re-applied and
> patterned on the correct face. What I need to know, does the stripping
> damage the silicon in anyway?
>
> Regards
>
> Richard Haigh
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