Hi Mike-
        I'm sure you are going to get a lot of responses that deal with wet
photo resists, but if you want to think outside the box, consider dry film
photoresist. We use it to mask through holes in silicon wafers and Pyrex
glass plates.

Phil Klauder
215-646-7400  x2151



-----Original Message-----
From: xiaohong [mailto:xiaohong@ee.ualberta.ca]
Sent: Monday, April 22, 2002 6:05 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] pit coverage - with resist


 Hello all - I recently switched from Semiconductor to MEMS and have
never had to worry about the kind of topography I am seeing now - Anyone
have suggestions on a resist and program that could be used for 70um
deep pit coverage No small geometrics to resolve......


 Thanks Mike O' in Alberta
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