durusmail: mems-talk: Wet etch of SOI
Wet etch of SOI
2002-04-20
2002-04-22
2002-04-23
2002-04-24
2002-04-26
Plasma etch of BCB
2002-04-24
Wet etch of SOI
Peng Yao
2002-04-23
Hi Jesse,
Will phosphoric acid attack Silicon as well?
Thanks

Peng Yao
DOEs lab
Electrical Engineering Dept.
Univeristy of delaware
Newark D.E 19716

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