DS-
Your concern for manufacturing is application dependent. So while there
will be a need for reliability, repeatability, predictability, and
uniformity, your end application specs will determine the bounds of your
manufacturing process from requirements of product performance, range of
temperature operation, failure criterion, etc.
Baseline parameters to monitor are:
(1) Material properties, such as CTE, elastic constants, tensile limits,
built-in stress, onset of inelasticity & fatigue, temperature
dependence of material and electrical properties,
polycrystalline grain structure, if any, etc.
(2) Geometry: precision in spring geometry, thickness and width, etc.
Mechanical behavior is extremely sensitive to geometry.
Based on the target device, you will have to determine how variations in
these critical parameters affect performance, and then determine an
acceptability requirement for the fabrication process.
Deejay S wrote:
> Hi,
>
> I'm working on a topology synthesis problem for MEMS devices. My ultimate
objective is to develop a tool which will give the topology of a compliant
mechanism, which can be fabricated by a given surface micromachining process.
> The idea is to take in the process sequence as input data, and then perform
FEM & topology optimization to come up with the compliant device, that performs
the required function and is fabricable by the input process.
>
> Though, I am getting favourable results, for the process sequence i am using
right now, i really dont know if i have really got it right, especially from the
manufacturing point of view.What are the manufacturing constraints of a typical
surface micromachining process that really affect the MEMS design at this
stage?Is there any available literature on this subject.Would really welcome
inputs from persons who have worked/are working on such a problem.
>
> Thanks.
>
> DS.
--
Raj Gupta, Director
Nanotechnology & MEMS Consulting
1425 Vallejo Street
Suite 203
San Francisco, CA 94109
+1 415 441 2398
Website: http://www.mindspring.com/~rajgupta