References by Mighty Platypus concern mostly with (100) silicon. We've done some work on Si (110) and (111) as given below. Kim, B. and Cho, D., "Aqueous KOH Etching of (110) Silicon: Etch Characteristics and Compensation Methods for Convex Corners", Journal of Electrochemical Society, vol. 145, no. 7, pp. 2499-2508, July 1998. Park, S., Lee, S., Yi, S., and Cho, D., "Mesa-supported, Single-crystal Microstructures Fabricated by the Surface/Bulk Micromachining (SBM) Process", Japanese Journal of Applied Physics, vol. 38, pp.4244-4249, July 1999. Mighty Platypus wrote: > References for corner compensation: > > X.P. Wu and W.-H. Ko, "A study on Compensating Corner Undercutting in > Anisotropic Etching of (100) Silicon," Transducers '87, pp. 126-9. > > H. Sandmaier, H.L. Offereins, K Ku:hl, and W. Lang, "Corner Compensation > Techniques in Anisotropic Etching of (100) Silicon Using Aqueous > KOH," Transducers '91, pp. 456-9. > > P. Enoksson, G. Stemme, and E. Stemme, "Vibration Modes of a Silicon Tube > Density Sensor," JMEMS V.5, #1, pp. 39-44. > > P. Enoksson, "New Structure for Corner Compensation in Anisotropic KOH > Etching," JMEMS V.7, #3, pp. 141-4. > > The source I got these from is pretty old, so it doesn't give anything > newer than about 1998. > > Jesse Fowler > UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV > Los Angeles, CA 90095-1597 | (310)825-3977 > "Battery is safe if not provoked." -- _Batteries in a Portable World_ > > On Mon, 22 Apr 2002, [iso-8859-1] Michele Finardi wrote: > > > Hallo, > > I'm about to start working on convex corner > > compensation. Could you please indicate me some > > references or share your personal knowledge? > > Thank you very much. > > > > Michele Finardi > > > > ______________________________________________________________________ > > Vinci i Mondiali - La Grande Sfida dei Mondiali FIFA > > http://it.yahoo.com/mail_it/foot/?http://lasfida.yahoo.net/ > > _______________________________________________ > > mems-talk@memsnet.org mailing list: to unsubscribe or change your list > > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > > Hosted by the MEMS Exchange, providers of MEMS processing services. > > Visit us at http://www.mems-exchange.org/ > _______________________________________________ > mems-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.mems-exchange.org/