According to "Etch Rates for Micromachining Processing" (JMEMS V.5,#4) it
will not attack single crystal silicon

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Battery is safe if not provoked." -- _Batteries in a Portable World_

On Tue, 23 Apr 2002, Peng Yao wrote:

> Hi Jesse,
> Will phosphoric acid attack Silicon as well?
> Thanks
>
> Peng Yao
> DOEs lab
> Electrical Engineering Dept.
> Univeristy of delaware
> Newark D.E 19716
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