Dear Ravi, Thanks for your answer, I usually make an anneal in H2N2 ambient for 20 minutes. The temperature ranges from 450:C to 500:C. I wonder if I can raise this temperature avoiding the diffusion of aluminium trough the wafer. Best regards, Sandra Ravi Shankar ha escrito: > Hi > The amount of doping and the proper annealing are a key to make good > contact. The if the doping of the P-type is less then there is all the > chance that you may end up with getting a schottkey contact rather than > ohmic(since Al also acts as a p type impurity in silicon so there will be > some diode formation). Your doping of around 3e15/cc may not be sufficient > as it will be better to have more than 1e18/cc to have good contact. > Also the annealing will not activate the impurity in their proper place in > silicon lattice, so you may not be able to achieve good contact if proper > annealing is not performed. what is the annealing done by you? > Regds > Ravi Shankar > Semiconductor Complex Ltd > India > > > On Mon, 22 Apr 2002, Sandra Bermejo wrote: > > > Hi, > > I would like to know if it is posible to make a good contact of > > aluminium and a P doped wafer. The doping level is about 3.10+15 cm-3. > > Maybe a suitable aluminium anealing would work? > > Thanks in advance, > > Sandra > > > > -- > > ********************************************************* > > Sandra Bermejo Broto > > Assistant Professor > > Electronic Engineering Department > > Semiconductor Devices Group (GDS) > > UPC-Campus Nord, C5 > > C/Jordi Girona, 1-3 > > E-08034 Barcelona > > SPAIN > > Phone: + 34 93 401 68 78 > > Fax: + 34 93 401 67 56 > > e-mail: sandra@eel.upc.es > > ********************************************************* > > _______________________________________________ > > mems-talk@memsnet.org mailing list: to unsubscribe or change your list > > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > > Hosted by the MEMS Exchange, providers of MEMS processing services. > > Visit us at http://www.mems-exchange.org/ > _______________________________________________ > mems-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.mems-exchange.org/