Hi mems-talk members,
I am wondering if someone knows about the process flow, the technology
(mterials, deposition methods, ...), or any reliable informations (papers, Web
sites) about the design of this successfull MOEM device, which is difficult or
may be impossible to make under some typical processes like MUMP's or SOI-based
process-flows. In fact, the only informations I got through the web includes
only some technical informations and advertisement stuffs.
Any help would be very gratefull and thanks in advance everyone.
sz



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