durusmail: mems-talk: Problem in applying Voltage across Pt
Problem in applying Voltage across Pt
2002-04-27
2002-04-29
2002-04-30
Problem in applying Voltage across Pt
Chan Ho Yin
2002-04-27
Hi all,

    I have deposited Pt onto Si substrate and make Pt into a line. When I
applied DC voltage to its two ends by micro probes, I found that there are
many bubbles come out from the contact point between the probes and Pt
layer.  I guess it dues to electrolysis. I also applied AC to it.. But
still many bubbles...

   What is the problem??  Can I reduce the bubbles or stop the bubbles
generated??  Can you suggest me some methods??????????

  By the way, the structure is a cantilever beam.  (2 layers).

Thank you.

Yours,
Hoyin

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