Hi mems-talk members,
I am a post-doc research fellow and I am looking for an optimal process flow
allowing me to get the compromise reliability/cost effectiveness to design a
double tiltable (2-DOF) micromirror. I got some bibliography about diffrent
designs but nothing special about the optical switches micromirrors (known as
Lamda Router) TM of Agere, formerly was Lucent Technologies microelectronics
division. I know only that it is difficult or may be impossible to make this
device under some standard technological processes like MUMP's or SOI-based
process-flows. In fact, the only informations I got through the web includes
only some general technical informations and advertisement about the device.
Does anyone, please, knows about the process flow, the technology (materials,
deposition methods, ...), or any reliable informations (papers, articles on
line) about this switches, that i can compare the processes together ?

Any help would be very gratefull and thanks in advance everyone.

Sofiane Zairi



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