Lester,

Thanks for the tip - a new bottle of BCB is on order.
I'm using 3022-46 (non-photosenstive) and intending to
planarize structures ~ 3-4um.

Any thoughts about the adhesion promoter, AP3000?

Incidentally, I've had decent success etching 3-4um
BCB films with 02/CF4 in 10min.  Conditions were
O2:CF4 mixture = 80%:20%, RIE power 300W,
Pressure=200mTorr.

Thanks,
Noah Clay


--- Lester Lopez  wrote:
> Noah,
>
> What brand BCB are you using and how old has it been
> sitting? Does it
> flow very slowly when you are dispensing it? I was
> having the same problem spinning on a silicon wafer
> sample and it turned
> out to be that the BCB had been sitting on the
> dispense bottle for some
> time.  As soon as I got a new batch of BCB the
> problem was solved.
>
> hope this helps,
>
> Lester Lopez
> University of South Florida
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