We are looking for information or referral for provider of a batch wafer
dryer system which may be used in-line with automated batch process systems.
We would prefer a stationery dryer, rather than a spin type dryer.  Since we
are already familar with the leading brands such as those manufactured by FSI
and L-Tech, we are wondering if anyone out there is aware of any new types of
stationery dryers, suitable for submicron cleaning, relatively low cost
(target price ~$25K), low consumption consumables - N2, IPA, etc., prefer
environmentally clean system, which lends itself by design to automatic
load/unload.  Please advise Frank Gavin at fsgavin@cs.com.