durusmail: mems-talk: photoimageable insulator
photoimageable insulator
2002-05-07
2002-05-07
2002-05-08
2002-05-06
2002-05-08
2002-05-09
photoimageable insulator
Bill Moffat
2002-05-06
Martin,
        photoimageable Polymide or B.C.B. sounds like the answer.  Bill Moffat

-----Original Message-----
From: Martin O. Patton [mailto:patton@er.com]
Sent: Friday, May 03, 2002 11:14 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] photoimageable insulator


Dear mems-talkers,

Is there a photoimageable insulator that can be applied to insulate trenches
in III-V wafers from metal contacts which cross the trenches?  I only have
wet chemistry, so don't tell me to RIE.

Thanks,

Marty

Martin O. Patton
Senior Research Engineer
Essential Research Inc.
6410 Eastland Road Suite D
Cleveland, Ohio 44142
www.er.com
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