Hello: For those who have MEMS designs difficult to convert, please visit: http://compho-3.eng.buffalo.edu/mask Upload your design in dxf format. We will convert it for you so long as we are not overwhelmed. Pao-Lo Liu Professor Department of Electrical and Computer Engieering State University of New York at Buffalo Buffalo, NY 14260-1900 (716) 645-3120x1207 paololiu@eng.buffalo.edu