durusmail: mems-talk: Anti-reflection coating for quartz and Al
Anti-reflection coating for quartz and Al
Anti-reflection coating for quartz and Al
Ali Razavi
2002-05-10
Hello,

   I plan to deposit Aluminium fingers on quartz wafers to make
reflection gratings. I also need to limit the aperture size. For this
purpose I need to deposit another layer such that
  1. it attaches both to quartz and to aluminium
  2. it does not reflect light
  I was wondering what kind of material/process I can use. Any
refernce in this regard?
  Thanks,
  Ali
-------------------------
 Ali Razavi, Ph.D.
 Room 455, Manufacturing Research Center
 Gerogia Institute of Technology, Atlanta, GA 30332-0405
 Phone: 678-637-1634, Fax: 404-894-9342
 E-mail: arazavi@pmrc.marc.gatech.edu

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