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Focused Ion Beam machining....
Check with FEI out of Beaverton Oregon, also the old Oregon Graduate Institute
now part of the OHSU has a machine you can rent for $160/hr (I think that rate
is negotiable).  Talk with Dr. Jack McCarthy...

>----- Original Message -----
>From: "Edward Y. Chan" 
>To: mems-talk@memsnet.org
>Sent: Fri, 10 May 2002 15:07:44
>
>Hi all,
>
>I was wondering if anyone could suggest the "best"
>way of creating a swimming pool like structure
>about 20 microns deep in a piece of fused silica.
>Basically, I need a trench with a known depth for
>fluid film thickness calibrations.  Any ideas or
>preferred companies for this?
>
>Thanks,
>Edward
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>-talk