You can also contact a bonding expert at EV Group. S.Farrens now works for EV, S.Farrens@EVGroup.com -----Original Message----- From: Michael Barger [mailto:mjbarger@netangel.com] Sent: Monday, May 13, 2002 11:53 AM To: mems-talk@memsnet.org Subject: RE: [mems-talk] Silicon Nitride Bonding Our group at the Hughes Aircraft Technology Center performed some collaboratory work with UC Davis back in the early 90's. Here are a couple of references. R. W. Bower, M. S. Ismail and B. E. Roberds, 'Low Temperature Si3N4 Direct Bonding'. Published in Appl. Phys. Lett., 28 June 1993 pp. 2485-3487. R. W. Bower, M. S. Ismail, B. E. Roberds and S. N. Farrens, 'One-Step Direct Bonding Process of Low Temperature Si3N4 and TiN Technology'. Conference on Solid-State Sensors and Actuators (Transducers 93), Yokohama, Japan. June (1993). Published in the Journal of Transducers 93 June (1993). Regards, Mike Barger Klesis Corporation +1 215 527 0313 -----Original Message----- From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On Behalf Of Mingiu Lee Sent: Saturday, May 11, 2002 11:03 PM To: mems-talk@memsnet.org Subject: [mems-talk] Silicon Nitride Bonding Dear Colleagues, Can anyone let us know how we can do nitride-nitride bonding? Thanks in advance. Derrick Chou Microlics LAUNCH - Your Yahoo! Music Experience http://launch.yahoo.com _______________________________________________ mems-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/ _______________________________________________ mems-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/