Kakasaheb, Techniques I have used with reasonable success in the past for characterisation of such multilayer stacks are SIMS depth profiling for physical characterisation. This is a destructive technique and due to matrix effects and mixing as you profile deeper, this approach is not strictly quantitative wrt compositional analysis, but can be made more accurate with the use of standards. For more information you might want to contact Charles Evans and Associates or the group at Surface Science Western (try Ross Davidson at 519-661-2173). Auger Electron Spectroscopy can also be made to work but you will have difficulty with charging. For optical characterisation, single layers can be precisely measured using ellipsometry. This approach runs out of steam with multilayer structures. If you have only a few layers then a Nanospec may be able to help you. If however you have constant n and k values for each layer and know that you have abrupt interfaces, and you can resort to an optical spectrometer to measure the angle dependant reflectivity of the stack and use this data to inversely synthesize the optical constants. Note that some approximations will have to be made but we got pretty good correlations using a book entitled "Computer-aided Techniques for the Design of Multilayer Filters" by H.M. Liddell when we did this work. There may be more recent references specific to what you are doing out there so start by looking for something that references this work. Good Luck Rick Williston Manager of Nanofabrication BigBangwidth Inc. Edmonton AB -----Original Message----- From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On Behalf Of kakasaheb chandrakant mohite Sent: Monday, May 13, 2002 11:37 AM To: mems-talk@memsnet.org Subject: [mems-talk] characterisation of multilayers Dear all, I have prepared multilayers of SiOxNy and MgF2 by electron beam physical vapor deposition technique.I would like to know different characterization methods of compositional and optical properties for these multilayers. Thanks in advance Yours K.C.Mohite ===== ********************************************************** K.C.Mohite Ph.9120-5695201(O) School Of Energy Studies 9120-7291872(R) Department of Physics University of Pune PUNE-411 007 INDIA LAUNCH - Your Yahoo! Music Experience http://launch.yahoo.com _______________________________________________ mems-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/