durusmail: mems-talk: PDMS pillar shape
PDMS pillar shape
2002-05-16
2002-05-16
2002-05-17
2002-05-20
2002-05-20
PDMS pillar shape
Bo He
2002-05-16
Dear All:

         I am working on making pillar arrays by PDMS. But when I pull
out PDMS from SU8 mold, I found most pillars were deformed (bent). The
reason I am thinking about is that the cavity on SU8 mold has positive
slope hence PDMS pillar has negative slope. The the top of PDMS pillar,
which is in contact with the bottom of the cavity on SU8 mold, is larger
then the bottom, so it's deformed or bent during pulling out. Is there
anyway to solve the problem? Any suggestion is highly appreciated.

Bo

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