MEMS Discussion Group Members:

I am a graduate student at the University of Illinois and need to determine the
deflections of micro-cantilever structures that result from thermal stresses
due to growing thin films of silicon dioxide on silicon. I would like to ask
that anyone who could direct me to information concerning an analytical model
for this problem please e-mail me at tmartel@boeotian.ece.uiuc.edu, thank you.

Ted Martel