durusmail: mems-talk: Gold film
Gold film
how to deposit PZT
2002-05-10
2002-05-20
2002-05-21
2002-05-22
Gold film
Michael D Martin
2002-05-21
I think you gold is diffusing into the oxide. I've seen similar behavior
with Pt on oxide. I think the solution is to shorten the annealing time
and/or reduce the temp..

Good luck,
    Mike

>>> gjit@cat.ernet.in 05/19/02 10:50PM >>>
Dear friend i have one query.
I am depositing gold film (thickness 0.1 micron)by thermal evaporation
on
oxides,
but when  i am annealing my sample to 700K this gold film become non
-conductive may be  duo to formation of gold oxide. But from
literature i found
that gold should not become oxide till 1200K. I also read people using
gold electrodes (thin film by thermal evaporation) on their samples
and
work till 900k kindly let me know where i am doing mistake, wether to
take
more thick film or something else.



_______________________________________________________________________________


   Gurvinderjit Singh Ahluwalia             Tel: +91-0731-488656
     Laser Materials Division               Fax: +91-0731-488650
   Centre for Advanced Technology         email: gjit@cat.ernet.in
   Indore - 452 013  INDIA

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