What is the condition of your annealing chamber?
Henry
--------------------------------------------------------------
Henry Yang
Mechanics and Micromechanics Group
IBM Almaden Research Center
408-927-2319
Ravi Shankar
cc:
Sent by: Subject: Re: [mems-talk] Gold
film
mems-talk-admin@m
emsnet.org
05/21/2002 09:43
AM
Please respond to
mems-talk
what is the conditions in your evaporation system.
Ravi shankar
On Mon, 20 May 2002, Gurvinderjit Singh wrote:
> Dear friend i have one query.
> I am depositing gold film (thickness 0.1 micron)by thermal evaporation on
> oxides,
> but when i am annealing my sample to 700K this gold film become non
> -conductive may be duo to formation of gold oxide. But from
> literature i found
> that gold should not become oxide till 1200K. I also read people using
> gold electrodes (thin film by thermal evaporation) on their samples and
> work till 900k kindly let me know where i am doing mistake, wether to
take
> more thick film or something else.
>
>
>
>
_______________________________________________________________________________
>
>
> Gurvinderjit Singh Ahluwalia Tel: +91-0731-488656
> Laser Materials Division Fax: +91-0731-488650
> Centre for Advanced Technology email: gjit@cat.ernet.in
> Indore - 452 013 INDIA
>
>
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