durusmail: mems-talk: Indium Etch
Indium Etch
2002-05-31
2002-05-31
2002-05-31
2002-06-02
Indium Etch
Jordan M. Berg
2002-06-02
Dear Milan,

From _Metallographic Etching_, 2nd Edition, by Gunter Petzow, published by
ASM, page 75.

Two chemical etches:

Etch 1 (Cd.m5) :  40 ml water, 10 ml 40% HF, 10 ml 30% H2O2. Etches in
seconds.
Etch 2 (Cd.m6): 100 ml 96% ethanol, 5 ml 32% HCl, 1 g picric acid. Etches in
seconds to minutes.

An electrochemical etch:

Etch 3 (Cd.EM1): 100 ml water, 200 ml 87% glycerol, 200 ml 85% phosphoric
acid. 8-9 V DC. Etches in 5-10 minutes. The book recommends a Cd cathode,
but the etch is for Cd or In. Since you're etching indium maybe an indium
cathode would be preferred.

I haven't tried these, so proceed with them at your own risk. Just someplace
for you to start if no one has some personal experience with something
better. Let me know how they work out!

Best regards,
Jordan

--------------------------------------------------------
Jordan M. Berg, Ph.D., P.E.
Associate Professor of Mechanical Engineering
Texas Tech University
Lubbock, TX 79409-1021

jordan.berg@ttu.edu


> --__--__--
>
> Message: 1
> From: "Milan Buncick" 
> To: "Mems-Talk \(E-mail\)" 
> Date: Fri, 31 May 2002 10:57:02 -0500
> Subject: [mems-talk] Indium Etch
> Reply-To: mems-talk@memsnet.org
>
> Hi all,
> Can someone please recommend an etch recipe for indium metal.
> Thanks,
> Milan
>
> Dr. Milan Buncick
> Director, MEMS/Photonics
> The AEgis TEchnologies Group Inc.
> 655 Discovery Drive
> Suite 301
> Huntsville, AL 35806
>
> --__--__--

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