check out this website

http://mems.colorado.edu

you might consider University of Colorado at Boulder

> Hi all,
>
> My name is Smitha and I had been working in the MEMS field for about a
> year.
> I'm now considering my options of going back to school for a graduate
> degree
> in a field related to MEMS. I did my undergraduate degree at New
> Jersey
> Institute of Technology majoring in Applied Physics with special
> emphasis on
> Microelectronics. I did some work on optical mirrors during my
> undergraduate
> program. Could you please direct me to schools/professors that do MEMS
> work
> where I could apply for admissions to a  grad program.
>
> Thanks,
> Smitha Mathews.
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>



***********************************
Faheem F. Faheem
University of Colorado
Mechaical Engineering
Campus Box 427
Boulder, CO 80309
PH: 303-492-0877
Fax: 303-492-3498
http://mems.colorado.edu
***********************************