Hello, Does anyone know whether SiN thin films form an oxide layer on it in the same way that Si does? Regards, Chris Blanford -- Christopher F. Blanford Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK Phone: (44)/(0)-1865-282603; Fax: (44)/(0)-1865-272690 PGP keyID: 8D830BC9 http://pgp.mit.edu/