durusmail: mems-talk: Post-Processing Etch Chemistry for CMOS AMIS ABN 1.5-mircon
Post-Processing Etch Chemistry for CMOS AMIS ABN 1.5-mircon
2002-06-11
Post-Processing Etch Chemistry for CMOS AMIS ABN 1.5-mircon
David Hong
2002-06-11
Can anyone suggest where I can send my chip for post-processing etch
chemistry for the AMIS ABN CMOS 1.5-micron?

Also, can anyone tell me approximately how much this process cost?

Thank you for your time.

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David S. Hong
McGill University - Microelectronics And Computer Systems - RF
Microelectronics
dhong@macs.ece.mcgill.ca
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