I am not sure if you still need this information. I
could buy 4 micron thermal oxide wafers from this
company. (www.universitywafer.com) I recall they even
had 10 micron thick oxide wafers. But know the price
is outrageous.
Best regards.
Sue

--- sckweon@samsung.co.kr wrote:
> Hello!
>
>   We are trying to find SOI wafer with thick SiO2
> layer about 6um thickness.
>
> Or If you know some group or person who deposite
> SiO2 film more than 6 um. Please,
>
> Let me know the contact point.
>
>   We are looking for sacrificial layer for
> poly-silicon actuator structure.
>
>
> Have a nice day for everybody.
>
>
>
> ----------------------------------
> Soon Cheol Kweon
>
> Members of Technical Staff.
> MEMS Lab.
>
> SAMSUNG
> Advanced Institute of Technology
>
> P.O.Box 111, Suwon
> 440-600, KOREA
>
> TEL:82-31-280-9448
> Fax:82-31-280-9473
> E-mail:sckweon@samsung.co.kr
>         infiniti@samsung.com
> -------------------------------------
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