durusmail: mems-talk: Thermal growth rates of Aluminum Oxide
Thermal growth rates of Aluminum Oxide
Thermal growth rates of Aluminum Oxide
Nicholas Jankowski
2002-06-21
"BERAUER,FRANK (HP-Singapore,ex7)" wrote:
>
> Just a thought: Why don't you just deposit more Al, such
> that after the erosion you have the thickness you desire?
> You said "not negotiable", but certainly sputtering a bit
> longer is something every Fab can do.

it would if i sputtered it on in the first place :)  See my previous
message to the list...

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