4um or even 6um or even 15um Si02 coated wafers are quite different than
SOI wafers with a 6um BOX layer. The former is quite easy to supply,
while bonding two wafers with 6um of oxide between them could prove to
be quite a challenge to most if not all of the SOI manufacturers.
I you need the wafers with high thickness Si02, let me know.

Regards,
Ken Smith

Soojin Oh wrote:

> I am not sure if you still need this information. I
> could buy 4 micron thermal oxide wafers from this
> company. (www.universitywafer.com) I recall they even
> had 10 micron thick oxide wafers. But know the price
> is outrageous.
> Best regards.
> Sue
>
> --- sckweon@samsung.co.kr wrote:
>
>>Hello!
>>
>>  We are trying to find SOI wafer with thick SiO2
>>layer about 6um thickness.
>>
>>Or If you know some group or person who deposite
>>SiO2 film more than 6 um. Please,
>>
>>Let me know the contact point.
>>
>>  We are looking for sacrificial layer for
>>poly-silicon actuator structure.
>>
>>
>>Have a nice day for everybody.
>>
>>
>>
>>----------------------------------
>>Soon Cheol Kweon
>>
>>Members of Technical Staff.
>>MEMS Lab.
>>
>>SAMSUNG
>>Advanced Institute of Technology
>>
>>P.O.Box 111, Suwon
>>440-600, KOREA
>>
>>TEL:82-31-280-9448
>>Fax:82-31-280-9473
>>E-mail:sckweon@samsung.co.kr
>>        infiniti@samsung.com


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