Hi, Everyone,

    we have a problem in making SU-8 suspension structures, such as cantilever
or bridge structure. We used Cu or Ni as the sacrificial layer. After we etched
the Cu or Ni to release the suspension structure, the SU-8 cantilever or bridge
was bended and misalignment. We cannot get the straight cantilever. Do you think
that was because of the SU-8 stress issue, or because the metal etchant attacked
the SU-8 and made it soft. Could you give us some suggestions about that?

Thanks,

Tao