durusmail: mems-talk: wet etching and/or dry etching of Ni
wet etching and/or dry etching of Ni
2002-06-24
2002-06-24
wet etching and/or dry etching of Ni
Xu Li
2002-06-24
Dear all,

Would anybody advice me how a straight and smooth side wall can be obtained by
either wet or dry etching through a ~200nm Ni film?

Thank you very much in advance!

Xu Li

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