Ion milling will probably give you the
best results.

If you need this done, please contact me


-Mike

_______________
Mike Bigelow
Technical Sales

DRC - Metrigraphics
60 Concord Street
Wilmington, MA 01887   USA

Tel:  + (978) 658-6100  ext. 3063
Fax: + (978) 657-7765


-----Original Message-----
From: Xu Li [mailto:xu.li@thzonline.com]
Sent: Monday, June 24, 2002 4:58 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] wet etching and/or dry etching of Ni


Dear all,

Would anybody advice me how a straight and smooth side wall can be obtained
by
either wet or dry etching through a ~200nm Ni film?

Thank you very much in advance!

Xu Li
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