You can visit our site at http://www.samcointl.com/prod/RIE.html to learn
more about SAMCO's line of RIE systems. Please contact us with any
questions or if you would like to receive additional information.

Shahram Malek
SAMCO International, Inc.


BobHendu@aol.com wrote:

> Have you considered rie etching the SiN? The results should be very
> acceptable with selectivity to the underlying oxide around 5:1 using a
> fluorine plasma. bob henderson
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