In the late '70 Watkins-Johnson was doing tin oxide CVD.  As I recal, they
were using a propietary etchant from a company called Minetch.

>>> nemeth@sophiawireless.com 06/24/02 07:44AM >>>
According to the Handbook of Metal Etchants (CRC), Tin Oxide is very
difficult to etch with a wet etch.  The only etch they suggest uses HBr
(Hydrobromic Acid), which is VERY noxious stuff.  Your best bet would
probably be a mechanical etch (RIE, Ion Milling, etc.).

David Nemeth
Senior Process Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576

-----Original Message-----
From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On
Behalf Of aslam muhammad
Sent: Sunday, June 23, 2002 4:16 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Tin Oxide etchant


Hi all,
what could be etchant for tinoxide ( SnO2 ), plz

thankx

M. Aslam
Yahoo! - Official partner of 2002 FIFA World Cup
http://fifaworldcup.yahoo.com
_______________________________________________
MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/
_______________________________________________
MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/

"This email and any attachments may contain information that is confidential
and proprietary information of Veeco Instruments Inc. and are intended only
for the use of the addressee. Unauthorized use, distribution or copying is
forbidden. If you have received this email in error, please notify the sender
immediately by return email and delete all copies of this message and any
attachments from your computer. Thank you."