hello everyone,
I am developing a fabrication process for a capacitive
mems switch. A gold bridge will be suspended over a
Coplanar Waveguide transmission line. The problem I am
facing is that the sacrificial layer that I am using
(PMGI SF15) will follow the contours of the
transmission line underneath it!! How can I get a
sacrificial layer profile that is maximally flat?
I would appreciate any input on this matter as soon as
possible!
Sincerely
Yazan Hijazi
Grad. Student in EE
Yahoo! - Official partner of 2002 FIFA World Cup
http://fifaworldcup.yahoo.com