Hello,
        As an experiment, or unintentionally, has
anyone encountered PLASMA CHARGE DAMAGE to their CMOS
CHIPS (fully fabricated) when a MEMS Structure,
along-side the CMOS Circuit, IS BEING RIE PLASMA ETCHED?

I would appreciate some form of feedback. If the answer is yes, and a
paper has been written about the experience, please let me know.

Thanks,

Phil



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