Dear friends,Dear MEMS colleagues
I have deposited Silicon oxynitride thin films by
EB-PVD.I would like to know the dependence of
substrate temperature on compositional and optical
properties (particularly refractive index and
reflectance) of these films.
Can someone point me to sources where optical
properties of SiOxNy can  be checked?

Thanks
K.C.Mohite

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K.C.Mohite                          Ph.9120-5695201(O)
School Of Energy Studies               9120-7291872(R)
Department of Physics
University of Pune
PUNE-411 007
INDIA
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