Phil,
     Addendum to my message.  Referring to message about CHARM wafers.  They
work, I use them to qualify my equipment.  Bill Moffat

-----Original Message-----
From: phil.lau@baesystems.com [mailto:phil.lau@baesystems.com]
Sent: Thursday, June 27, 2002 9:00 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] PLASMA CHARGE DAMAGE to CMOS/MEMS?


Hello,
        As an experiment, or unintentionally, has
anyone encountered PLASMA CHARGE DAMAGE to their CMOS
CHIPS (fully fabricated) when a MEMS Structure,
along-side the CMOS Circuit, IS BEING RIE PLASMA ETCHED?

I would appreciate some form of feedback. If the answer is yes, and a
paper has been written about the experience, please let me know.

Thanks,

Phil



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