We are currently using MOSIS service to fabricate a thermal isolation
structure. Functional coating is deposited in house.

One of the issues is electrically connecting our functional coating to the
underlying aluminum contacts. The aluminum contact via is surrounded by
Si/SiO2 that's approximately one micron in height. Our functional coating
is thin and not entirely conformal, and therefore we have a relatively
moderate yield. Is there a way, by design or fabrication, to achieve a
smooth surface?

Barry Chen, Sr. Research Engineer
ATMI, Materials Lifecycle Solutions