assuming you are doing your fab run through MOSIS, or at least using the
same processes available there, the following links may be of service:

http://www.austriamicrosystems.com/0foundry/technology/index_si08.htm
http://www.austriamicrosystems.com/0foundry/technology/SiGe_08.pdf

I believe there are some process specs there that could get you what you
need.